[IEEE 2013 8th IEEE International Conference on Nano/Micro...

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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Low-stress packaging for a MEMS atmosphere pressure sensor

Mengying Zhang,, Lidong Du,, Zhan Zhao,, Zhen Fang,
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Year:
2013
Language:
english
DOI:
10.1109/nems.2013.6559817
File:
PDF, 507 KB
english, 2013
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