[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Low-stress packaging for a MEMS atmosphere pressure sensor
Mengying Zhang,, Lidong Du,, Zhan Zhao,, Zhen Fang,Year:
2013
Language:
english
DOI:
10.1109/nems.2013.6559817
File:
PDF, 507 KB
english, 2013