[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Ion energy spread measurements of inductively coupled plasma ion source
Nabhiraj, P.Y., Menon, Ranjini, Bhandari, R. K., Rao, G. Mohan, Mohan, S.Year:
2008
Language:
english
DOI:
10.1109/plasma.2008.4590685
File:
PDF, 33 KB
english, 2008