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Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films Using Solution of Zinc Acetate
Takenaka, Kosuke, Okumura, Yusuke, Setsuhara, YuichiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.01AC11
Date:
January, 2013
File:
PDF, 608 KB
english, 2013