Automated Generation of Layered Model for Surface Micro-machined MEMS
Li, Jianhua, Gao, Shuming, Liu, YushengVolume:
1
Language:
english
Journal:
Computer-Aided Design and Applications
DOI:
10.1080/16864360.2004.10738252
Date:
January, 2004
File:
PDF, 503 KB
english, 2004