[IEEE 2006 IEEE 4th World Conference on Photovoltaic Energy Conference - Waikoloa, HI (2006.05.7-2006.05.12)] 2006 IEEE 4th World Conference on Photovoltaic Energy Conference - Development of Localized Plasma Confinement (LPC) CVD method for high rate and uniform deposition of thin-film crystalline Si
Matsumoto, Mitsuhiro, Kawamoto, Kunihiro, Mishima, Takahiro, Haku, Hisao, Shima, Masaki, Terakawa, Akira, Tanaka, MakotoYear:
2006
Language:
english
DOI:
10.1109/wcpec.2006.279787
File:
PDF, 250 KB
english, 2006