Effects of wafer temperature on plasma charging induced...

IEEE Electron Device Letters 1995 / 12 Vol. 16; Iss. 12

Effects of wafer temperature on plasma charging induced damage to MOS gate oxide

Shawming Ma,, McVittie, J.P., Saraswat, K.C.
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Volume:
16
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.475578
Date:
December, 1995
File:
PDF, 309 KB
english, 1995
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