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[IEEE ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures - Kobe, Japan (19-22 March 2001)] ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) - Use of electrical test structures to characterize trench profiles etched on SOI wafers
Guillaume, N., Kiihamaki, J., Karttunen, J., Kattelus, H.Year:
2001
Language:
english
DOI:
10.1109/icmts.2001.928655
File:
PDF, 510 KB
english, 2001