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[IEEE 13th International Conference on Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. - Beijing, People's Republic of China (Sept. 20-25, 2005)] 13th International Conference on Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. - Growth and characterization of 4h-SiC by horizontal hot-wall CVD
Guosheng Sun,, Xin Gao,, Lei Wang,, Wanshun Zhao,, Yiping Zeng,, Jinmin Li,Year:
2005
Language:
english
DOI:
10.1109/sim.2005.1511393
File:
PDF, 927 KB
english, 2005