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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Industrial Applications of Atomic Layer Deposition
Ritala, Mikko, Niinistö, JaakkoYear:
2009
Language:
english
DOI:
10.1149/1.3207651
File:
PDF, 665 KB
english, 2009