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[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Thin-Gate CMOS and Super-Thick Gate DECMOS Integration in 0° On-axis ≪100≫ Starting Wafer: Process Challenges and Solutions
Wu, Xiaoju, Mahalingam, Pushpa, Knerr, Ron, Patton, Yvonne, Hao, Pinghai, Khan, Imran, Hannaman, DavidYear:
2006
Language:
english
DOI:
10.1109/issm.2006.4493130
File:
PDF, 3.18 MB
english, 2006