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[IEEE 2013 International Semiconductor Conference Dresden - Grenoble (ISCDG) - Dresden, Germany (2013.09.26-2013.09.27)] 2013 International Semiconductor Conference Dresden - Grenoble (ISCDG) - An Energy Harvester concept for electrostatic conversion manufactured in MEMS surface micromachining technology
Iannacci, Jacopo, Sordo, Guido, Gottardi, Massimo, Kuenzig, Thomas, Schrag, Gabriele, Wachutka, GerhardYear:
2013
Language:
english
DOI:
10.1109/iscdg.2013.6656310
File:
PDF, 5.07 MB
english, 2013