High-Temperature Leakage Improvement in...

IEEE Electron Device Letters 2007 / 03 Vol. 28; Iss. 3

High-Temperature Leakage Improvement in Metal–Insulator–Metal Capacitors by Work–Function Tuning

Chiang, K. C., Cheng, C. H., Pan, H. C., Hsiao, C. N., Chou, C. P., Chin, Albert, Hwang, H. L.
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.891265
Date:
March, 2007
File:
PDF, 234 KB
english, 2007
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