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Dual passivation of GaAs (110) surfaces using O2/H2O and trimethylaluminum
Kent, Tyler J., Edmonds, Mary, Chagarov, Evgueni, Droopad, Ravi, Kummel, Andrew C.Volume:
139
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.4852155
Date:
December, 2013
File:
PDF, 2.26 MB
english, 2013