Negative effect of crystallization on the mechanism of laser damage in a HfO2/SiO2 multilayer
Tateno, Ryo, Okada, Hajime, Otobe, Tomohito, Kawase, Keigo, Koga, James K., Kosuge, Atsushi, Nagashima, Keisuke, Sugiyama, Akira, Kashiwagi, KunihiroVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4767231
File:
PDF, 1.79 MB
english, 2012