Quasi-three-dimensional modeling of sub-micron LOCOS...

IEEE Transactions on Semiconductor Manufacturing 1995 / Nov. Vol. 8; Iss. 4

Quasi-three-dimensional modeling of sub-micron LOCOS structures

Park, H., Smeys, P., Sahul, Z.H., Saraswat, K.C., Dutton, R.W., Hojung Hwang,
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Volume:
8
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.475180
Date:
January, 1995
File:
PDF, 1.12 MB
english, 1995
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