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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Self-assembly templates by selective plasma surface modification of micropatterned photoresist
Jeonggi Seo,, Ertekin, E., Pio, M.S., Lee, L.P.Year:
2002
Language:
english
DOI:
10.1109/memsys.2002.984237
File:
PDF, 407 KB
english, 2002