Interfacial defect states in HfO/sub 2/ and ZrO/sub 2/ nMOS...

IEEE Electron Device Letters 2002 / 12 Vol. 23; Iss. 12

Interfacial defect states in HfO/sub 2/ and ZrO/sub 2/ nMOS capacitors

Mudanai, S., Li, F., Samavedam, S.B., Tobin, P.J., Kang, C.S., Nieh, R., Lee, J.C., Register, L.F., Banerjee, S.K.
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Volume:
23
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2002.805753
Date:
December, 2002
File:
PDF, 252 KB
english, 2002
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