![](/img/cover-not-exists.png)
Investigation of Al-doped silicon nitride-based semiconductor and its shrinkage mechanism
Mao, Zhiyong, Zhu, Yingchun, Zeng, Yi, Xu, Fangfang, Liu, Zhen, Ma, Guohong, Du, Zuliang, Geng, WentongVolume:
14
Year:
2012
Language:
english
Journal:
CrystEngComm
DOI:
10.1039/c2ce25758k
File:
PDF, 988 KB
english, 2012