Investigation of Optical Power Tolerance for MEMS Mirrors

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

Investigation of Optical Power Tolerance for MEMS Mirrors

Knoernschild, Caleb, Changsoon Kim,, Gregory, Christopher W, Lu, Felix P, Jungsang Kim,
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2045736
Date:
June, 2010
File:
PDF, 630 KB
english, 2010
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