Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile...

Dalton Transactions 2012 Vol. 41; Iss. 45

Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

Milanov, Andrian P., Xu, Ke, Cwik, Stefan, Parala, Harish, de los Arcos, Teresa, Becker, Hans-Werner, Rogalla, Detlef, Cross, Richard, Paul, Shashi, Devi, Anjana
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Volume:
41
Year:
2012
Language:
english
Journal:
Dalton Transactions
DOI:
10.1039/c2dt31219k
File:
PDF, 2.72 MB
english, 2012
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