[IEEE 2006 International Conference on Actual Problems of Electron Devices Engineering - Saratov, Russia (2006.09.20-2006.09.21)] 2006 International Conference on Actual Problems of Electron Devices Engineering - Investigation Model of Multipurpose Technological Device for Vacuum Plasma Treatment Thin Films Deposited on Band Substrate
Generalova, T.B., Yafarov, R.K.Year:
2006
Language:
russian
DOI:
10.1109/apede.2006.307436
File:
PDF, 224 KB
russian, 2006