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[IEEE 23rd International Conference on Microelectronics (MIEL 2002) - Nis, Yugoslavia (12-15 May 2002)] 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) - Properties of Si-SiO/sub 2/ structure with ultrathin dielectrics for nano- and microelectronics device application
Evtukh, A.A., Lisovski, I.P., Litovchenko, V.G., Kizjak, A.Yu., Mazunov, D., Szekeres, A.Volume:
2
Year:
2002
Language:
english
DOI:
10.1109/miel.2002.1003374
File:
PDF, 229 KB
english, 2002