Microphysical investigations on mechanical structures...

Journal of Microelectromechanical Systems 1995 / Sept. Vol. 4; Iss. 3

Microphysical investigations on mechanical structures realized in p/sup +/ silicon

Cabuz, C., Fukatsu, K., Kurabayashi, T., Minami, K., Esashi, M.
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Volume:
4
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.465124
Date:
January, 1995
File:
PDF, 937 KB
english, 1995
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