[IEEE 23rd International Reliability Physics Symposium - Orlando, FL, USA (1985.03.25-1985.03.29)] 23rd International Reliability Physics Symposium - Moisture Resistance of Polyimide Multilevel Interconnect LSI's
Nishida, Takashi, Mukai, Kiichiro, Inaba, Tohru, Kato, Tokio, Tezuka, Izumi, Horie, NoboruYear:
1985
Language:
english
DOI:
10.1109/irps.1985.362090
File:
PDF, 4.65 MB
english, 1985