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[IEEE Frequency Control Symposium - New Orleans, LA, USA (29-31 May 2002)] Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234) - Growth of piezoelectric aluminium nitride for layered SAW devices
Assouar, M.B., Elmazria, O., Le Brizoual, L., Belmahi, M., Alnot, P.Year:
2002
Language:
english
DOI:
10.1109/FREQ.2002.1075903
File:
PDF, 312 KB
english, 2002