[IEEE Frequency Control Symposium - New Orleans, LA, USA...

[IEEE Frequency Control Symposium - New Orleans, LA, USA (29-31 May 2002)] Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234) - Growth of piezoelectric aluminium nitride for layered SAW devices

Assouar, M.B., Elmazria, O., Le Brizoual, L., Belmahi, M., Alnot, P.

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Year:

2002

Language:

english

DOI:

10.1109/FREQ.2002.1075903

File:

PDF, 312 KB

english, 2002

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