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[IEEE 2014 19th Asia and South Pacific Design Automation Conference (ASP-DAC) - Singapore (2014.01.20-2014.01.23)] 2014 19th Asia and South Pacific Design Automation Conference (ASP-DAC) - Self-aligned double patterning layout decomposition with complementary e-beam lithography
Gao, Jhih-Rong, Yu, Bei, Pan, David Z.Year:
2014
Language:
english
DOI:
10.1109/aspdac.2014.6742880
File:
PDF, 434 KB
english, 2014