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Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide
Eigenfeld, Nathan T., Gray, Jason M., Brown, Joseph J., Skidmore, George D., George, Steven M., Bright, Victor M.Volume:
26
Language:
english
Journal:
Advanced Materials
DOI:
10.1002/adma.201400410
Date:
June, 2014
File:
PDF, 1.38 MB
english, 2014