[IEEE 2009 International Conference on Intelligent Human-Machine Systems and Cybernetics - Hangzhou, Zhejiang, China (2009.08.26-2009.08.27)] 2009 International Conference on Intelligent Human-Machine Systems and Cybernetics - FEM Analysis of Micro-machined Airflow Accelerometer's Sensitive Mechanism
Li, Yan-jie, Piao, Lin-hua, Li, Bai-hua, Zhang, Fu-xueYear:
2009
Language:
english
DOI:
10.1109/ihmsc.2009.204
File:
PDF, 652 KB
english, 2009