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[IEEE 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Stresa, Italy (2007.06.11-2007.06.12)] 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
Lee, Fourmun, Marcus, Steve, Shero, Eric, Wilk, Glen, Swerts, Johan, Maes, Jan Willem, Blomberg, Tom, Delabie, Annelies, Gros-Jean, Mickael, Deloffre, EmilieYear:
2007
Language:
english
DOI:
10.1109/asmc.2007.375064
File:
PDF, 475 KB
english, 2007