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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Tapered Deep Reactive Ion Etching: Method and Characterization
Roxhed, Niclas, Griss, Patrick, Stemme, GoranYear:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300175
File:
PDF, 714 KB
english, 2007