Highly textured growth of AlN films on sapphire by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2011 Vol. 29; Iss. 2

Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

Aubert, T., Assouar, M. B., Legrani, O., Elmazria, O., Tiusan, C., Robert, S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3551604
File:
PDF, 956 KB
english, 2011
Conversion to is in progress
Conversion to is failed