Composite metal etching for submicron integrated circuits

Composite metal etching for submicron integrated circuits

Riley, P.E., Ben-tzur, M., Kavari, R.
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Volume:
8
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.401006
Date:
January, 1995
File:
PDF, 423 KB
english, 1995
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