Using Dynamic Voltage Drive in a Parallel-Plate...

Journal of Microelectromechanical Systems 2006 / 02 Vol. 15; Iss. 1

Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning

Rocha, L.A., Cretu, E., Wolffenbuttel, R.F.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.859099
Date:
February, 2006
File:
PDF, 4.30 MB
english, 2006
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