Novel chemical route for atomic layer deposition of MoS 2 thin film on SiO 2 /Si substrate
Jin, Zhenyu, Shin, Seokhee, Kwon, Do Hyun, Han, Seung-Joo, Min, Yo-SepVolume:
6
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c4nr04816d
Date:
October, 2014
File:
PDF, 685 KB
english, 2014