Novel chemical route for atomic layer deposition of MoS...

Novel chemical route for atomic layer deposition of MoS 2 thin film on SiO 2 /Si substrate

Jin, Zhenyu, Shin, Seokhee, Kwon, Do Hyun, Han, Seung-Joo, Min, Yo-Sep
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Volume:
6
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c4nr04816d
Date:
October, 2014
File:
PDF, 685 KB
english, 2014
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