[IEEE 2010 IEEE International Conference on Automation Science and Engineering (CASE 2010) - Toronto, ON (2010.08.21-2010.08.24)] 2010 IEEE International Conference on Automation Science and Engineering - Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing
Schirru, Andrea, Pampuri, Simone, De Nicolao, GiuseppeYear:
2010
Language:
english
DOI:
10.1109/coase.2010.5584508
File:
PDF, 554 KB
english, 2010