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[IEEE 2012 Third International Conference on Digital Manufacturing and Automation (ICDMA) - Guilin, China (2012.07.31-2012.08.2)] 2012 Third International Conference on Digital Manufacturing & Automation - Depth Homogeneity of Porous Silicon Multilayer
Rongxia, Liu, Changwu, Lv, Hongyan, Zhang, Zhenhong, JiaYear:
2012
Language:
english
DOI:
10.1109/icdma.2012.73
File:
PDF, 655 KB
english, 2012