![](/img/cover-not-exists.png)
Achieving Uniformity in a Semiconductor Fabrication Process using Spatial Modeling
Hughes-Oliver, Jacqueline M., Lu, Jye-Chyi, Davis, Joseph C., Gyurcsik, Ronald S.Volume:
93
Language:
english
Journal:
Journal of the American Statistical Association
DOI:
10.1080/01621459.1998.10474085
Date:
March, 1998
File:
PDF, 1.07 MB
english, 1998