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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - A microcantilever-based gas flow sensor for flow rate and direction detection
Yu-Hsiang Wang,, Tzu-Han Hsueh,, Rong-Hua Ma,, Chia-Yen Lee,, Lung-Ming Fu,, Po-Cheng Chou,, Chien-Hsiung Tsai,Year:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752970
File:
PDF, 2.36 MB
english, 2008