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[IEEE Comput. Soc 1999 IEEE International Conference on Microelectronics Systems Education (MSE'99) - Arlington, VA, USA (19-21 July 1999)] Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE'99) 'Systems Education in the 21st Century' (Cat. No.99-63794) - Realization and SEM observation of polysilicon and aluminium cantilever using surface micromachining technology
Lucas, S., Outaleb, N., Bonnaud, O., Pinel, J.Year:
1999
Language:
english
DOI:
10.1109/mse.1999.787021
File:
PDF, 103 KB
english, 1999