[IEEE 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (21-25 July 1997)] Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Ion beam induced charge imaging for the failure analysis of semiconductor devices
Kolachina, S., Chan, D.S.H., Phang, J.C.H., Osipowicz, T., Sanchez, J.L., Watt, S.F.Year:
1997
Language:
english
DOI:
10.1109/ipfa.1997.638362
File:
PDF, 884 KB
english, 1997