Catalyst-enhanced vapor-phase epitaxy of quartz thin films...

Journal of Materials Chemistry 2002 / 2 Vol. 12; Iss. 3

Catalyst-enhanced vapor-phase epitaxy of quartz thin films under atmospheric pressure

Takahashi, Naoyuki, Hoshogi, Masayuki, Nakumura, Takato, Momose, Yoshimi, Nonaka, Satoshi, Yagi, Hiromi, Sinriki, Yoichi, Tamanuki, Katsumi
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Volume:
12
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b108850p
Date:
February, 2002
File:
PDF, 220 KB
english, 2002
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