Versatile Size and Shape Microlens Arrays With High Numerical Apertures
Lee, Hyunjoo J., Kim, Yanghee, Yoon, Eui-Sung, Cho, Il-JooVolume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2305993
Date:
August, 2014
File:
PDF, 1022 KB
english, 2014