Chemical vapour deposition of In2O3 thin films from a...

Dalton Transactions 2011 Vol. 40; Iss. 37

Chemical vapour deposition of In2O3 thin films from a tris-guanidinate indium precursor

Barry, Seán T., Gordon, Peter G., Ward, Matthew J., Heikkila, Mikko J., Monillas, Wesley H., Yap, Glenn P. A., Ritala, Mikko, Leskelä, Markku
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Volume:
40
Year:
2011
Language:
english
Journal:
Dalton Transactions
DOI:
10.1039/c1dt10877h
File:
PDF, 456 KB
english, 2011
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