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[IEEE 2006 International Students and Young Scientists Workshop - Photonics and Microsystems - Wroclaw, Poland (2006.06.30-2006.07.2)] 2006 International Students and Young Scientists Workshop - Photonics and Microsystems - Fabrication of Si3N4 Layers by Pulse Magnetron Sputtering Method
Macherzynski, Wojciech, Prociow, Eugeniusz, Paszkiewicz, Bogdan, Prazmowska, JoannaYear:
2006
Language:
english
DOI:
10.1109/stysw.2006.343666
File:
PDF, 2.50 MB
english, 2006