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Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy
Usui, Akira, Sunakawa, Haruo, Sakai, Akira, Yamaguchi, A. AtsushiVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L899
Date:
July, 1997
File:
PDF, 1.71 MB
1997