Thick GaN Epitaxial Growth with Low Dislocation Density by...

Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy

Usui, Akira, Sunakawa, Haruo, Sakai, Akira, Yamaguchi, A. Atsushi
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L899
Date:
July, 1997
File:
PDF, 1.71 MB
1997
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