Design of an ultra-compact electro-absorption modulator comprised of a deposited TiN/HfO_2/ITO/Cu stack for CMOS backend integration
Zhu, Shiyang, Lo, G. Q., Kwong, D. L.Volume:
22
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.22.017930
Date:
July, 2014
File:
PDF, 2.39 MB
english, 2014