[IEEE 2007 IEEE Symposium on VLSI Technology - Kyoto, Japan...

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[IEEE 2007 IEEE Symposium on VLSI Technology - Kyoto, Japan (2007.06.12-2007.06.14)] 2007 IEEE Symposium on VLSI Technology - Enhanced Performance of Strained CMOSFETs Using Metallized Source/Drain Extension (M-SDE)

Chen, Hung-Wei, Ko, Chih-Hsin, Wang, Tzu-Juei, Ge, Chung-Hu, Wu, Kehuey, Lee, Wen-Chin
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Year:
2007
Language:
english
DOI:
10.1109/vlsit.2007.4339750
File:
PDF, 394 KB
english, 2007
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