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[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - EEDF evolution measurement in an inductive RF discharge
Godyak, V.A., Piejak, R.B., Alexandrovich, B.M.Year:
1996
Language:
english
DOI:
10.1109/plasma.1996.550239
File:
PDF, 134 KB
english, 1996