Comparison of capacitive and feedback-interferometric...

Journal of Microelectromechanical Systems 2001 / Sept. Vol. 10; Iss. 3

Comparison of capacitive and feedback-interferometric measurements on MEMS

Annovazzi-Lodi, V., Merlo, S., Norgia, M.
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Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.946778
Date:
January, 2001
File:
PDF, 181 KB
english, 2001
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