![](/img/cover-not-exists.png)
[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Effect of Thermal Annealing on the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC
Giannazzo, F., Roccaforte, F., Raineri, V., Salinas, D.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383821
File:
PDF, 1.12 MB
english, 2007